Griffiths, Matthew B. E.; Dubrawski, Zachary S.; Bačić, Goran; Japahuge, Achini; Masuda, Jason Douglas, 1977-; Zeng, Tao; Barry, Seán T. (Wiley, 2019-12-15)
Atomic layer deposition (ALD) of gold is being studied by multiple research groups, but to date no process using non-energetic co-reactants has been demonstrated. In order to access milder co-reactants, precursors with ...